Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays
We have investigated direct micromachining of quartz glass, using pulsed laser plasma soft x-rays (LPSXs) having a potential capability of nanomachining because the diffraction limit is ∼ 10 nm . The LPSX's were generated by irradiation of a Ta target with 532 nm laser light from a conventional...
Gespeichert in:
| Veröffentlicht in: | Applied physics letters 2005-03, Vol.86 (10), p.103111-103111-3 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 103111-3 |
|---|---|
| container_issue | 10 |
| container_start_page | 103111 |
| container_title | Applied physics letters |
| container_volume | 86 |
| creator | Makimura, Tetsuya Miyamoto, Hisao Kenmotsu, Youichi Murakami, Kouichi Niino, Hiroyuki |
| description | We have investigated direct micromachining of quartz glass, using pulsed laser plasma soft x-rays (LPSXs) having a potential capability of nanomachining because the diffraction limit is
∼
10
nm
. The LPSX's were generated by irradiation of a
Ta
target with
532
nm
laser light from a conventional Q switched
Nd
:
YAG
laser at
700
mJ
∕
pulse
. In order to achieve a sufficient power density of LPSX's beyond the ablation threshold, we developed an ellipsoidal mirror to obtain efficient focusing of LPSXs at around
10
nm
. It was found that quartz glass plates are smoothly ablated at
45
nm
∕
shot
using the focused and pulsed LPSX's. |
| doi_str_mv | 10.1063/1.1882750 |
| format | Article |
| fullrecord | <record><control><sourceid>scitation_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1063_1_1882750</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>apl</sourcerecordid><originalsourceid>FETCH-LOGICAL-c429t-c18cb725f1824b0328e51c19147119cf93f386de26dc36c69720c27854fb034d3</originalsourceid><addsrcrecordid>eNp1kE1LxDAQQIMoWFcP_oNcPXTNJG2TXgRZP2FBED2XbJqskX6ZyYLrr7ele_HgaRjeYxgeIZfAlsAKcQ1LUIrLnB2RBJiUqQBQxyRhjIm0KHM4JWeIn-OacyES8nrngzWRtt6EvtXmw3e-29Le0a-dDvGHbhuNSIdGR4t0hxMcdg3amo7Aholgqyn2LtLvNOg9npMTp0fj4jAX5P3h_m31lK5fHp9Xt-vUZLyMqQFlNpLnDhTPNkxwZXMwUEImAUrjSuGEKmrLi9qIwhSl5MxwqfLMjXZWiwW5mu-OnyMG66oh-FaHfQWsmmJUUB1ijO7N7KLxUUffd__Lc5HqTxHxC8K6Zq8</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays</title><source>AIP Journals Complete</source><source>AIP Digital Archive</source><creator>Makimura, Tetsuya ; Miyamoto, Hisao ; Kenmotsu, Youichi ; Murakami, Kouichi ; Niino, Hiroyuki</creator><creatorcontrib>Makimura, Tetsuya ; Miyamoto, Hisao ; Kenmotsu, Youichi ; Murakami, Kouichi ; Niino, Hiroyuki</creatorcontrib><description>We have investigated direct micromachining of quartz glass, using pulsed laser plasma soft x-rays (LPSXs) having a potential capability of nanomachining because the diffraction limit is
∼
10
nm
. The LPSX's were generated by irradiation of a
Ta
target with
532
nm
laser light from a conventional Q switched
Nd
:
YAG
laser at
700
mJ
∕
pulse
. In order to achieve a sufficient power density of LPSX's beyond the ablation threshold, we developed an ellipsoidal mirror to obtain efficient focusing of LPSXs at around
10
nm
. It was found that quartz glass plates are smoothly ablated at
45
nm
∕
shot
using the focused and pulsed LPSX's.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.1882750</identifier><identifier>CODEN: APPLAB</identifier><language>eng</language><publisher>American Institute of Physics</publisher><ispartof>Applied physics letters, 2005-03, Vol.86 (10), p.103111-103111-3</ispartof><rights>2005 American Institute of Physics</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c429t-c18cb725f1824b0328e51c19147119cf93f386de26dc36c69720c27854fb034d3</citedby><cites>FETCH-LOGICAL-c429t-c18cb725f1824b0328e51c19147119cf93f386de26dc36c69720c27854fb034d3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/apl/article-lookup/doi/10.1063/1.1882750$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>314,776,780,790,1553,4498,27901,27902,76126,76132</link.rule.ids></links><search><creatorcontrib>Makimura, Tetsuya</creatorcontrib><creatorcontrib>Miyamoto, Hisao</creatorcontrib><creatorcontrib>Kenmotsu, Youichi</creatorcontrib><creatorcontrib>Murakami, Kouichi</creatorcontrib><creatorcontrib>Niino, Hiroyuki</creatorcontrib><title>Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays</title><title>Applied physics letters</title><description>We have investigated direct micromachining of quartz glass, using pulsed laser plasma soft x-rays (LPSXs) having a potential capability of nanomachining because the diffraction limit is
∼
10
nm
. The LPSX's were generated by irradiation of a
Ta
target with
532
nm
laser light from a conventional Q switched
Nd
:
YAG
laser at
700
mJ
∕
pulse
. In order to achieve a sufficient power density of LPSX's beyond the ablation threshold, we developed an ellipsoidal mirror to obtain efficient focusing of LPSXs at around
10
nm
. It was found that quartz glass plates are smoothly ablated at
45
nm
∕
shot
using the focused and pulsed LPSX's.</description><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNp1kE1LxDAQQIMoWFcP_oNcPXTNJG2TXgRZP2FBED2XbJqskX6ZyYLrr7ele_HgaRjeYxgeIZfAlsAKcQ1LUIrLnB2RBJiUqQBQxyRhjIm0KHM4JWeIn-OacyES8nrngzWRtt6EvtXmw3e-29Le0a-dDvGHbhuNSIdGR4t0hxMcdg3amo7Aholgqyn2LtLvNOg9npMTp0fj4jAX5P3h_m31lK5fHp9Xt-vUZLyMqQFlNpLnDhTPNkxwZXMwUEImAUrjSuGEKmrLi9qIwhSl5MxwqfLMjXZWiwW5mu-OnyMG66oh-FaHfQWsmmJUUB1ijO7N7KLxUUffd__Lc5HqTxHxC8K6Zq8</recordid><startdate>20050307</startdate><enddate>20050307</enddate><creator>Makimura, Tetsuya</creator><creator>Miyamoto, Hisao</creator><creator>Kenmotsu, Youichi</creator><creator>Murakami, Kouichi</creator><creator>Niino, Hiroyuki</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20050307</creationdate><title>Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays</title><author>Makimura, Tetsuya ; Miyamoto, Hisao ; Kenmotsu, Youichi ; Murakami, Kouichi ; Niino, Hiroyuki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c429t-c18cb725f1824b0328e51c19147119cf93f386de26dc36c69720c27854fb034d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Makimura, Tetsuya</creatorcontrib><creatorcontrib>Miyamoto, Hisao</creatorcontrib><creatorcontrib>Kenmotsu, Youichi</creatorcontrib><creatorcontrib>Murakami, Kouichi</creatorcontrib><creatorcontrib>Niino, Hiroyuki</creatorcontrib><collection>CrossRef</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Makimura, Tetsuya</au><au>Miyamoto, Hisao</au><au>Kenmotsu, Youichi</au><au>Murakami, Kouichi</au><au>Niino, Hiroyuki</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays</atitle><jtitle>Applied physics letters</jtitle><date>2005-03-07</date><risdate>2005</risdate><volume>86</volume><issue>10</issue><spage>103111</spage><epage>103111-3</epage><pages>103111-103111-3</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>We have investigated direct micromachining of quartz glass, using pulsed laser plasma soft x-rays (LPSXs) having a potential capability of nanomachining because the diffraction limit is
∼
10
nm
. The LPSX's were generated by irradiation of a
Ta
target with
532
nm
laser light from a conventional Q switched
Nd
:
YAG
laser at
700
mJ
∕
pulse
. In order to achieve a sufficient power density of LPSX's beyond the ablation threshold, we developed an ellipsoidal mirror to obtain efficient focusing of LPSXs at around
10
nm
. It was found that quartz glass plates are smoothly ablated at
45
nm
∕
shot
using the focused and pulsed LPSX's.</abstract><pub>American Institute of Physics</pub><doi>10.1063/1.1882750</doi><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0003-6951 |
| ispartof | Applied physics letters, 2005-03, Vol.86 (10), p.103111-103111-3 |
| issn | 0003-6951 1077-3118 |
| language | eng |
| recordid | cdi_crossref_primary_10_1063_1_1882750 |
| source | AIP Journals Complete; AIP Digital Archive |
| title | Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T20%3A28%3A50IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-scitation_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Direct%20micromachining%20of%20quartz%20glass%20plates%20using%20pulsed%20laser%20plasma%20soft%20x-rays&rft.jtitle=Applied%20physics%20letters&rft.au=Makimura,%20Tetsuya&rft.date=2005-03-07&rft.volume=86&rft.issue=10&rft.spage=103111&rft.epage=103111-3&rft.pages=103111-103111-3&rft.issn=0003-6951&rft.eissn=1077-3118&rft.coden=APPLAB&rft_id=info:doi/10.1063/1.1882750&rft_dat=%3Cscitation_cross%3Eapl%3C/scitation_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |