Effects of substrate treatment on the initial growth mode of indium-tin-oxide films

Effects of substrate treatment on the initial growth mode of indium-tin-oxide films

The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed f...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of applied physics 2005-01, Vol.97 (2)
Hauptverfasser: Han, Younggun, Kim, Donghwan, Cho, Jun-Sik, Beag, Young-Whan, Koh, Seok-Keun, Chernysh, Vladimir S.
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue 2
container_start_page
container_title Journal of applied physics
container_volume 97
creator Han, Younggun
Kim, Donghwan
Cho, Jun-Sik
Beag, Young-Whan
Koh, Seok-Keun
Chernysh, Vladimir S.
description The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.
doi_str_mv 10.1063/1.1835003
format Article
fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1063_1_1835003</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1063_1_1835003</sourcerecordid><originalsourceid>FETCH-LOGICAL-c295t-6ee412bd034250e714f56adb675af6c79830cd473bf6660064b3ad87aae3e9ea3</originalsourceid><addsrcrecordid>eNotkLFOwzAURS0EEqEw8AdeGVye49iOR1QVilSJAZgjJ36mRkmMbFfA39OKTle6uucOh5BbDksOStzzJW-FBBBnpOLQGqalhHNSAdSctUabS3KV8ycAP-xMRV7X3uNQMo2e5n2fS7IFaUloy4RzoXGmZYc0zKEEO9KPFL_Ljk7R4ZEIswv7iZUws_gTDp0P45SvyYW3Y8abUy7I--P6bbVh25en59XDlg21kYUpxIbXvQPR1BJQ88ZLZV2vtLReDdq0AgbXaNF7pRSAanphXautRYEGrViQu__fIcWcE_ruK4XJpt-OQ3e00fHuZEP8AQKWUkA</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Effects of substrate treatment on the initial growth mode of indium-tin-oxide films</title><source>AIP Journals Complete</source><source>AIP Digital Archive</source><creator>Han, Younggun ; Kim, Donghwan ; Cho, Jun-Sik ; Beag, Young-Whan ; Koh, Seok-Keun ; Chernysh, Vladimir S.</creator><creatorcontrib>Han, Younggun ; Kim, Donghwan ; Cho, Jun-Sik ; Beag, Young-Whan ; Koh, Seok-Keun ; Chernysh, Vladimir S.</creatorcontrib><description>The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.</description><identifier>ISSN: 0021-8979</identifier><identifier>EISSN: 1089-7550</identifier><identifier>DOI: 10.1063/1.1835003</identifier><language>eng</language><ispartof>Journal of applied physics, 2005-01, Vol.97 (2)</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c295t-6ee412bd034250e714f56adb675af6c79830cd473bf6660064b3ad87aae3e9ea3</citedby><cites>FETCH-LOGICAL-c295t-6ee412bd034250e714f56adb675af6c79830cd473bf6660064b3ad87aae3e9ea3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Han, Younggun</creatorcontrib><creatorcontrib>Kim, Donghwan</creatorcontrib><creatorcontrib>Cho, Jun-Sik</creatorcontrib><creatorcontrib>Beag, Young-Whan</creatorcontrib><creatorcontrib>Koh, Seok-Keun</creatorcontrib><creatorcontrib>Chernysh, Vladimir S.</creatorcontrib><title>Effects of substrate treatment on the initial growth mode of indium-tin-oxide films</title><title>Journal of applied physics</title><description>The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.</description><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNotkLFOwzAURS0EEqEw8AdeGVye49iOR1QVilSJAZgjJ36mRkmMbFfA39OKTle6uucOh5BbDksOStzzJW-FBBBnpOLQGqalhHNSAdSctUabS3KV8ycAP-xMRV7X3uNQMo2e5n2fS7IFaUloy4RzoXGmZYc0zKEEO9KPFL_Ljk7R4ZEIswv7iZUws_gTDp0P45SvyYW3Y8abUy7I--P6bbVh25en59XDlg21kYUpxIbXvQPR1BJQ88ZLZV2vtLReDdq0AgbXaNF7pRSAanphXautRYEGrViQu__fIcWcE_ruK4XJpt-OQ3e00fHuZEP8AQKWUkA</recordid><startdate>20050115</startdate><enddate>20050115</enddate><creator>Han, Younggun</creator><creator>Kim, Donghwan</creator><creator>Cho, Jun-Sik</creator><creator>Beag, Young-Whan</creator><creator>Koh, Seok-Keun</creator><creator>Chernysh, Vladimir S.</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20050115</creationdate><title>Effects of substrate treatment on the initial growth mode of indium-tin-oxide films</title><author>Han, Younggun ; Kim, Donghwan ; Cho, Jun-Sik ; Beag, Young-Whan ; Koh, Seok-Keun ; Chernysh, Vladimir S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c295t-6ee412bd034250e714f56adb675af6c79830cd473bf6660064b3ad87aae3e9ea3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Han, Younggun</creatorcontrib><creatorcontrib>Kim, Donghwan</creatorcontrib><creatorcontrib>Cho, Jun-Sik</creatorcontrib><creatorcontrib>Beag, Young-Whan</creatorcontrib><creatorcontrib>Koh, Seok-Keun</creatorcontrib><creatorcontrib>Chernysh, Vladimir S.</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Han, Younggun</au><au>Kim, Donghwan</au><au>Cho, Jun-Sik</au><au>Beag, Young-Whan</au><au>Koh, Seok-Keun</au><au>Chernysh, Vladimir S.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effects of substrate treatment on the initial growth mode of indium-tin-oxide films</atitle><jtitle>Journal of applied physics</jtitle><date>2005-01-15</date><risdate>2005</risdate><volume>97</volume><issue>2</issue><issn>0021-8979</issn><eissn>1089-7550</eissn><abstract>The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.</abstract><doi>10.1063/1.1835003</doi></addata></record>
fulltext fulltext
identifier ISSN: 0021-8979
ispartof Journal of applied physics, 2005-01, Vol.97 (2)
issn 0021-8979
1089-7550
language eng
recordid cdi_crossref_primary_10_1063_1_1835003
source AIP Journals Complete; AIP Digital Archive
title Effects of substrate treatment on the initial growth mode of indium-tin-oxide films
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-21T09%3A53%3A22IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Effects%20of%20substrate%20treatment%20on%20the%20initial%20growth%20mode%20of%20indium-tin-oxide%20films&rft.jtitle=Journal%20of%20applied%20physics&rft.au=Han,%20Younggun&rft.date=2005-01-15&rft.volume=97&rft.issue=2&rft.issn=0021-8979&rft.eissn=1089-7550&rft_id=info:doi/10.1063/1.1835003&rft_dat=%3Ccrossref%3E10_1063_1_1835003%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true