Combined effect of preferential orientation and Zr/Ti atomic ratio on electrical properties of Pb(ZrxTi1−x)O3 thin films
Lead zirconate titanate [Pb(ZrxTi1−x)O3, PZT] thin films with various compositions, whose Zr/Ti ratio were varied as 40/60, 48/52, 47/53, and 60/40, were deposited on Pt(111)/Ti/SiO2/Si substrates by sol-gel method. A seeding layer was introduced between the PZT layer and the bottom electrode to con...
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Veröffentlicht in: | Journal of applied physics 2004-07, Vol.96 (1), p.590-595 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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