Ion energy distribution change at the transition of power-coupling modes in an immersed-coil-type inductively coupled Ar discharge

Ion energy distribution change at the transition of power-coupling modes in an immersed-coil-type inductively coupled Ar discharge

The power-coupling mode was changed from a capacitively coupled (E-mode) to an inductively coupled (H-mode) with an increase of rf input power in an immersed-coil-type inductively coupled Ar discharge at 1 mTorr. It was identified that the bimodal-shaped ion energy distribution (IED) of the capaciti...

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Veröffentlicht in:Applied physics letters 2004-04, Vol.84 (17), p.3283-3285
Hauptverfasser: Kang, Dae-Hwan, Lee, Dong-Kak, Kim, Ki-Bum, Lee, Jung-Joong, Joo, Junghoon
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container_end_page 3285
container_issue 17
container_start_page 3283
container_title Applied physics letters
container_volume 84
creator Kang, Dae-Hwan
Lee, Dong-Kak
Kim, Ki-Bum
Lee, Jung-Joong
Joo, Junghoon
description The power-coupling mode was changed from a capacitively coupled (E-mode) to an inductively coupled (H-mode) with an increase of rf input power in an immersed-coil-type inductively coupled Ar discharge at 1 mTorr. It was identified that the bimodal-shaped ion energy distribution (IED) of the capacitively coupled discharge was dominant below 100 W (E-mode), while the single peak due to the inductively coupled discharge became dominant above 250 W (H-mode). In addition, it was possible to quantitatively determine the relative amounts of capacitively and inductively coupled components at both modes, making the analysis of IED one of most effective methods to investigate the power-coupling mode transition in an inductively coupled plasma system.
doi_str_mv 10.1063/1.1715140
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title Ion energy distribution change at the transition of power-coupling modes in an immersed-coil-type inductively coupled Ar discharge
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