$Study of Ion-Bombardment Damage on a Ge (111) Surface by Low-Energy Electron Diffraction$

Study of Ion-Bombardment Damage on a Ge (111) Surface by Low-Energy Electron Diffraction

An atomically clean and highly ordered Ge (111) surface was bombarded with Ar+ ions and the bombardment effects were studied by low-energy electron diffraction. Degradation characteristics of the (10) beam were most extensively investigated over an ion energy range from 10 eV to 1 keV with ion dosag...

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Veröffentlicht in:	Journal of Applied Physics (U.S.) 1965-09, Vol.36 (9), p.2674-2681
Hauptverfasser:	Jacobson, R. L., Wehner, G. K.
Format:	Artikel
Sprache:	eng
Schlagworte:	ARGON Atomic Physics CATIONS CRYSTALS DEFECTS DISLOCATIONS ENERGY GERMANIUM ION BEAMS PHYSICS RECOVERY SURFACES
Online-Zugang:	Volltext
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