Behavior of Ultrathin Zirconium Films upon Exposure to Oxygen

Discontinuous films of zirconium, having surface resistivities between 104 and 106 Ω sq−1, were deposited on glass substrates in ultrahigh vacuum and then exposed to oxygen pressures in the range of 5×10−7 to 4×10−8 Torr at temperatures of 25° and −196°C. The change in film resistance with time was...

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Veröffentlicht in:	J. Appl. Phys., 38: 2223-31(Apr. 1967) 38: 2223-31(Apr. 1967), 1967-01, Vol.38 (5), p.2223-2231
1. Verfasser:	Fehlner, Francis P.
Format:	Artikel
Sprache:	eng
Schlagworte:	ELECTRIC CONDUCTIVITY N30130 -Metals, Ceramics, & Other Materials-Metals & Alloys-Properties Evaluations OXIDATION OXYGEN ZIRCONIUM
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