Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon

We compare the optical properties, chemical composition, and crystallinity of silicon microstructures formed in the presence of SF6 by femtosecond laser irradiation and by nanosecond laser irradiation. In spite of very different morphology and crystallinity, the optical properties and chemical compo...

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Veröffentlicht in:	Applied physics letters 2004-03, Vol.84 (11), p.1850-1852
Hauptverfasser:	Crouch, C. H., Carey, J. E., Warrender, J. M., Aziz, M. J., Mazur, E., Génin, F. Y.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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