Energy dissipation in a thin polymer film by electron beam scattering

Monte Carlo calculations have been performed to determine the spatial distribution of energy dissipated in a 4000-Å-thick film of polymethyl methacrylate (PMMA), due to an incident electron beam. The calculations were performed for 5-, 10-, and 20-keV electrons on a silicon substrate and also for 20...

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Veröffentlicht in:	Journal of applied physics 1974-06, Vol.45 (6), p.2551-2566
Hauptverfasser:	Hawryluk, R. J., Hawryluk, Andrew M., Smith, Henry I.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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