Strain relaxation during in situ growth of SrTiO3 thin films

We report a real-time observation of strain relaxation during in situ growth of SrTiO3 thin films by measuring the in-plane lattice constant at the film surface using reflection high-energy electron diffraction. The initial misfit strain in the SrTiO3 film is tensile on MgO and compressive on LaAlO3...

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Veröffentlicht in:	Applied physics letters 2003-12, Vol.83 (22), p.4592-4594
Hauptverfasser:	Peng, Luke S.-J., Xi, X. X., Moeckly, Brian H., Alpay, S. P.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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