Formation of platinum-based silicide contacts: Kinetics, stoichiometry, and current drive capabilities

A detailed analysis of the formation of Pt2Si and PtSi silicides is proposed, based on x-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM), and electrical characterizations. Published kinetics of the Pt2Si and PtSi transformations under ultrahigh vacuum condition are conso...

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Veröffentlicht in:	Journal of applied physics 2003-12, Vol.94 (12), p.7801-7810
Hauptverfasser:	Larrieu, G., Dubois, E., Wallart, X., Baie, X., Katcki, J.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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