Highly stable and textured hydrogenated ZnO thin films

Highly stable and textured hydrogenated ZnO thin films

We investigated intentionally hydrogenated zinc oxide (ZnO:H) fabricated by combining photoassisted metalorganic chemical vapor deposition and mercury-sensitized hydrogen addition methods. We found that intentionally incorporated hydrogen plays an important role in n-type conduction as a donor, impr...

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Veröffentlicht in:Applied physics letters 2003-05, Vol.82 (18), p.3026-3028
Hauptverfasser: Myong, Seung Yeop, Lim, Koeng Su
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Lim, Koeng Su
description We investigated intentionally hydrogenated zinc oxide (ZnO:H) fabricated by combining photoassisted metalorganic chemical vapor deposition and mercury-sensitized hydrogen addition methods. We found that intentionally incorporated hydrogen plays an important role in n-type conduction as a donor, improving free carrier concentration and electrical stability. We simultaneously obtained improved surface roughness of the ZnO:H film due to an enhancement of (112̄0) orientation. The high-quality ZnO:H film is promising as a back reflector material for thin-film solar cells.
doi_str_mv 10.1063/1.1571651
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title Highly stable and textured hydrogenated ZnO thin films
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