Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses

Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses

We report on a feature, that of hillock-shaped damage, formed on a glass surface by femtosecond pulses of tp=180 fs [full width at half maximum (FWHM) value] duration produced by a recording beam focus with energy of 5 nJ/pulse at 800 nm wavelength (the corresponding irradiance of about 7.6 TW/cm2 w...

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Veröffentlicht in:Applied physics letters 2003-04, Vol.82 (17), p.2901-2903
Hauptverfasser: Vanagas, Egidijus, Kudryashov, Igor, Tuzhilin, Dmitrii, Juodkazis, Saulius, Matsuo, Shigeki, Misawa, Hiroaki
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container_end_page 2903
container_issue 17
container_start_page 2901
container_title Applied physics letters
container_volume 82
creator Vanagas, Egidijus
Kudryashov, Igor
Tuzhilin, Dmitrii
Juodkazis, Saulius
Matsuo, Shigeki
Misawa, Hiroaki
description We report on a feature, that of hillock-shaped damage, formed on a glass surface by femtosecond pulses of tp=180 fs [full width at half maximum (FWHM) value] duration produced by a recording beam focus with energy of 5 nJ/pulse at 800 nm wavelength (the corresponding irradiance of about 7.6 TW/cm2 was evaluated for a 0.68 μm FWHM spot size). Single hillocks of 40–50 nm height were recorded reproducibly in single-pulse irradiation. Surface nanopatterning over a large, curved area (over 200 μm2) can be achieved by implementing a confocal surface curvature tracking method that utilizes the reflection of a supplementary cw-laser beam. The ablation pattern achieved by this method is consistent with that of a Coulomb explosion.
doi_str_mv 10.1063/1.1570514
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title Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses
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