Engineering the nanocrystalline structure of TiO2 films by aerodynamically filtered cluster deposition

We have produced nanocrystalline titanium dioxide films with different structures (anatase or rutile) by depositing mass selected clusters from the gas phase. Nanoparticles are produced by a pulsed microplasma cluster source and are selected by aerodynamic separation effects. We have characterized n...

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Veröffentlicht in:	Applied physics letters 2002-10, Vol.81 (16), p.3052-3054
Hauptverfasser:	Barborini, E., Kholmanov, I. N., Piseri, P., Ducati, C., Bottani, C. E., Milani, P.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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