Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering

Small angle x-ray scattering (SAXS) measurements were performed on nanoporous methyl silsesquioxane films that were generated by the incorporation of a sacrificial polymeric component into the matrix and subsequently removed by thermolysis. The average pore radii ranged from 1 to 5 nm over a porosit...

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Veröffentlicht in:	Applied physics letters 2002-09, Vol.81 (12), p.2232-2234
Hauptverfasser:	Huang, E., Toney, M. F., Volksen, W., Mecerreyes, D., Brock, P., Kim, H.-C., Hawker, C. J., Hedrick, J. L., Lee, V. Y., Magbitang, T., Miller, R. D., Lurio, L. B.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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