Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering
Small angle x-ray scattering (SAXS) measurements were performed on nanoporous methyl silsesquioxane films that were generated by the incorporation of a sacrificial polymeric component into the matrix and subsequently removed by thermolysis. The average pore radii ranged from 1 to 5 nm over a porosit...
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| Veröffentlicht in: | Applied physics letters 2002-09, Vol.81 (12), p.2232-2234 |
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| creator | Huang, E. Toney, M. F. Volksen, W. Mecerreyes, D. Brock, P. Kim, H.-C. Hawker, C. J. Hedrick, J. L. Lee, V. Y. Magbitang, T. Miller, R. D. Lurio, L. B. |
| description | Small angle x-ray scattering (SAXS) measurements were performed on nanoporous methyl silsesquioxane films that were generated by the incorporation of a sacrificial polymeric component into the matrix and subsequently removed by thermolysis. The average pore radii ranged from 1 to 5 nm over a porosity range of ∼5–50%. The distribution in pore size was relatively broad and increases in breadth with porosity. The values and observations obtained by SAXS are in good agreement with field emission scanning electron microscopy. |
| doi_str_mv | 10.1063/1.1507841 |
| format | Article |
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F. ; Volksen, W. ; Mecerreyes, D. ; Brock, P. ; Kim, H.-C. ; Hawker, C. J. ; Hedrick, J. L. ; Lee, V. Y. ; Magbitang, T. ; Miller, R. D. ; Lurio, L. B.</creator><creatorcontrib>Huang, E. ; Toney, M. F. ; Volksen, W. ; Mecerreyes, D. ; Brock, P. ; Kim, H.-C. ; Hawker, C. J. ; Hedrick, J. L. ; Lee, V. Y. ; Magbitang, T. ; Miller, R. D. ; Lurio, L. B.</creatorcontrib><description>Small angle x-ray scattering (SAXS) measurements were performed on nanoporous methyl silsesquioxane films that were generated by the incorporation of a sacrificial polymeric component into the matrix and subsequently removed by thermolysis. The average pore radii ranged from 1 to 5 nm over a porosity range of ∼5–50%. The distribution in pore size was relatively broad and increases in breadth with porosity. 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B.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering</atitle><jtitle>Applied physics letters</jtitle><date>2002-09-16</date><risdate>2002</risdate><volume>81</volume><issue>12</issue><spage>2232</spage><epage>2234</epage><pages>2232-2234</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>Small angle x-ray scattering (SAXS) measurements were performed on nanoporous methyl silsesquioxane films that were generated by the incorporation of a sacrificial polymeric component into the matrix and subsequently removed by thermolysis. The average pore radii ranged from 1 to 5 nm over a porosity range of ∼5–50%. The distribution in pore size was relatively broad and increases in breadth with porosity. 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| ispartof | Applied physics letters, 2002-09, Vol.81 (12), p.2232-2234 |
| issn | 0003-6951 1077-3118 |
| language | eng |
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| source | AIP Journals Complete; AIP Digital Archive |
| title | Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering |
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