Structural and optical properties of thin zirconium oxide films prepared by reactive direct current magnetron sputtering

Thin films of zirconium oxide have been deposited onto glass and Si(100) substrates at room temperature by reactive dc magnetron sputtering of a metallic Zr target in an argon–oxygen atmosphere. The films were characterized by Rutherford backscattering spectroscopy, x-ray diffraction, x-ray reflecto...

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Veröffentlicht in:	Journal of applied physics 2002-10, Vol.92 (7), p.3599-3607
Hauptverfasser:	Venkataraj, S., Kappertz, Oliver, Weis, Hansjörg, Drese, Robert, Jayavel, R., Wuttig, Matthias
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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