Nanotomography based on hard x-ray microscopy with refractive lenses
Based on parabolic refractive x-ray lenses we have built a hard x-ray microscope that allows one to image the interior of opaque samples with submicrometer resolution. We have combined magnified imaging with tomography to obtain the three-dimensional structure of the sample at a resolution well belo...
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| Veröffentlicht in: | Applied physics letters 2002-08, Vol.81 (8), p.1527-1529 |
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| container_title | Applied physics letters |
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| creator | Schroer, C. G. Meyer, J. Kuhlmann, M. Benner, B. Günzler, T. F. Lengeler, B. Rau, C. Weitkamp, T. Snigirev, A. Snigireva, I. |
| description | Based on parabolic refractive x-ray lenses we have built a hard x-ray microscope that allows one to image the interior of opaque samples with submicrometer resolution. We have combined magnified imaging with tomography to obtain the three-dimensional structure of the sample at a resolution well below 1 μm. Using an aluminum lens to record a magnified tomogram of a test sample (microprocessor), a resolution of slightly above 400 nm was found for the three-dimensional reconstruction. Lenses made of beryllium are expected to improve this resolution to well below 100 nm. The resulting challenges concerning instrumentation and numerical methods are discussed. |
| doi_str_mv | 10.1063/1.1501451 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0003-6951 |
| ispartof | Applied physics letters, 2002-08, Vol.81 (8), p.1527-1529 |
| issn | 0003-6951 1077-3118 |
| language | eng |
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| source | AIP Journals Complete; AIP Digital Archive |
| title | Nanotomography based on hard x-ray microscopy with refractive lenses |
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