Correlation between plasma expansion dynamics and gold-thin film structure during pulsed-laser deposition

Pulsed-laser deposition of Au thin films has been achieved by ablating a gold target with a KrF excimer Laser in various conditions of ambient Ar gas pressure (from 10−5 to 4 Torr) and target-to-substrate distance (from 1.0 to 11 cm). The dynamics of the plasma plume were measured in the same condit...

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Veröffentlicht in:	Applied physics letters 2002-03, Vol.80 (10), p.1716-1718
Hauptverfasser:	Irissou, Eric, Le Drogoff, Boris, Chaker, Mohamed, Guay, Daniel
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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