Annealing effects on structures and optical properties of silicon nanostructured films prepared by pulsed-laser ablation in inert background gas

We studied the annealing effects on the structures and optical properties of silicon (Si) nanostructured films. The Si nanostructured films were synthesized by pulsed-laser ablation in inert background gas. It was found that the Si nanostructured films partially include an amorphous-like structure u...

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Veröffentlicht in:	Journal of applied physics 2001-11, Vol.90 (10), p.5075-5080
Hauptverfasser:	Makino, Toshiharu, Yamada, Yuka, Suzuki, Nobuyasu, Yoshida, Takehito, Onari, Seinosuke
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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