Intrinsic stress, island coalescence, and surface roughness during the growth of polycrystalline films
During film growth by a variety of techniques, intrinsic tensile stresses can be created by the coalescence of neighboring islands. Experimental results with diamond films produced by chemical vapor deposition are compared with a relatively simple model to demonstrate that a realistic interpretation...
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| Veröffentlicht in: | Journal of applied physics 2001-11, Vol.90 (10), p.5097-5103 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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