Efficient technique for producing high-brightness, size-selected cluster beams

An efficient technique for producing size-selected cluster beams from a magnetron cluster source is described. In this technique the clusters are ejected from a laminar gas expansion nozzle and the resulting size selection is achieved with a simple parallel-plate electrostatic separator. Using this...

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Veröffentlicht in:	Applied physics letters 2001-10, Vol.79 (15), p.2477-2479
Hauptverfasser:	Denby, P. M., Eastham, D. A.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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