Novel electronic design for double-modulation spectroscopy of semiconductor and semiconductor microstructures
The double-modulation reflectance technique has proven to be a powerful characterization tool of semiconductors applied in high-background–light-interference systems. In this article, we present a novel and inexpensive electronic-circuit design for implementing the double-modulation measurements usi...
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| Veröffentlicht in: | Review of scientific instruments 2001-11, Vol.72 (11), p.4218-4222 |
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| container_issue | 11 |
| container_start_page | 4218 |
| container_title | Review of scientific instruments |
| container_volume | 72 |
| creator | Ho, Ching-Hwa Hsieh, Chang-Hsun Chen, Ying-Jui Huang, Ying-Sheng Tiong, Kwong-Kau |
| description | The double-modulation reflectance technique has proven to be a powerful characterization tool of semiconductors applied in high-background–light-interference systems. In this article, we present a novel and inexpensive electronic-circuit design for implementing the double-modulation measurements using only one lock-in amplifier. The electronic design is fabricated in an accessory hardware of modulation spectroscopy which can easily select the double- or single-modulation mode via a manual switch. Detailed design diagrams of the electronic hardware are described. Measurements of some representative samples of semiconductors and actual device structures are carried out. Experimental results demonstrated the well-behaved performance of this design. |
| doi_str_mv | 10.1063/1.1409571 |
| format | Article |
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| ispartof | Review of scientific instruments, 2001-11, Vol.72 (11), p.4218-4222 |
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| language | eng |
| recordid | cdi_crossref_primary_10_1063_1_1409571 |
| source | AIP Journals Complete; AIP Digital Archive |
| title | Novel electronic design for double-modulation spectroscopy of semiconductor and semiconductor microstructures |
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