Electron temperature analysis of two-gas-species inductively coupled plasma

The electron energy distribution functions and electron temperatures are measured in Ar/He and Ar/Xe inductively coupled plasma with various mixing ratios. The electron temperature does not change linearly with the mixing ratios; instead it increases abruptly near PHe/PAr+He=1 and decreases rapidly...

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Veröffentlicht in:	Applied physics letters 2001-09, Vol.79 (11), p.1596-1598
Hauptverfasser:	Bai, K. H., Chang, H. Y., Uhm, H. S.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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