Electron transport, ionization, and attachment coefficients in C2F4 and C2F4/Ar mixtures

Measurements of electron transport, effective ionization, and attachment coefficients are reported for C2F4. In addition, measurements of the electron drift velocity and the effective ionization coefficient as a function of the density-reduced electric field E/N are reported for mixtures of C2F4 wit...

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Veröffentlicht in:	The Journal of chemical physics 2001-05, Vol.114 (20), p.8932-8937
Hauptverfasser:	Goyette, A. N., de Urquijo, J., Wang, Yicheng, Christophorou, L. G., Olthoff, J. K.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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