Surface analysis of ultraprecise polished chemical vapor deposited diamond films using spectroscopic and microscopic techniques

Chemical vapor deposited (CVD) diamond films of varying crystallographic orientations and sizes were thermochemically polished on steel plates. The sizes of the grains constituting the films used in this work ranged between 10 and 100 μm. Images of the surface morphologies of the films were obtained...

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Veröffentlicht in:	Journal of applied physics 2001-02, Vol.89 (4), p.2434-2440
Hauptverfasser:	Weima, J. A., Job, R., Fahrner, W. R., Kosaca, G. C., Müller, N., Fries, T.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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