Crystallization of amorphous WNx films
The microstructural changes of WNx films during annealing were analyzed using transmission electron microscopy and x-ray diffraction. Amorphous WNx films eventually crystallized to a two-phase mixture of W and W2N through the primary crystallization and eutectic crystallization. The resulting micros...
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| Veröffentlicht in: | Journal of applied physics 2001-04, Vol.89 (7), p.4128-4133 |
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| container_end_page | 4133 |
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| container_issue | 7 |
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| container_title | Journal of applied physics |
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| creator | Suh, Bong-Seok Cho, Heung-Kuon Lee, Yoon-Jik Lee, Won-Jun Park, Chong-Ook |
| description | The microstructural changes of WNx films during annealing were analyzed using transmission electron microscopy and x-ray diffraction. Amorphous WNx films eventually crystallized to a two-phase mixture of W and W2N through the primary crystallization and eutectic crystallization. The resulting microstructure after annealing at 800 °C consisted of large primary crystals with a eutectic mixture of W and W2N microcrystallites in the intergranular boundary region. In case of the amorphous film with near-eutectic composition of W0.79N0.21, it transformed directly into a two-phase mixture of W and W2N through the eutectic crystallization at 600 °C without the primary crystallization. On the other hand, polycrystalline W2N films had a columnar structure and did not undergo any microstructural change during annealing up to 800 °C. Barrier properties of WNx film versus Cu diffusion are discussed in relation with the microstructural changes of the films. |
| doi_str_mv | 10.1063/1.1337079 |
| format | Article |
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Amorphous WNx films eventually crystallized to a two-phase mixture of W and W2N through the primary crystallization and eutectic crystallization. The resulting microstructure after annealing at 800 °C consisted of large primary crystals with a eutectic mixture of W and W2N microcrystallites in the intergranular boundary region. In case of the amorphous film with near-eutectic composition of W0.79N0.21, it transformed directly into a two-phase mixture of W and W2N through the eutectic crystallization at 600 °C without the primary crystallization. On the other hand, polycrystalline W2N films had a columnar structure and did not undergo any microstructural change during annealing up to 800 °C. Barrier properties of WNx film versus Cu diffusion are discussed in relation with the microstructural changes of the films.</description><identifier>ISSN: 0021-8979</identifier><identifier>EISSN: 1089-7550</identifier><identifier>DOI: 10.1063/1.1337079</identifier><language>eng</language><ispartof>Journal of applied physics, 2001-04, Vol.89 (7), p.4128-4133</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c227t-78467b47bbc56fa9f05d08752ed37452353197ae3169127e067c9da364eb25053</citedby><cites>FETCH-LOGICAL-c227t-78467b47bbc56fa9f05d08752ed37452353197ae3169127e067c9da364eb25053</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Suh, Bong-Seok</creatorcontrib><creatorcontrib>Cho, Heung-Kuon</creatorcontrib><creatorcontrib>Lee, Yoon-Jik</creatorcontrib><creatorcontrib>Lee, Won-Jun</creatorcontrib><creatorcontrib>Park, Chong-Ook</creatorcontrib><title>Crystallization of amorphous WNx films</title><title>Journal of applied physics</title><description>The microstructural changes of WNx films during annealing were analyzed using transmission electron microscopy and x-ray diffraction. Amorphous WNx films eventually crystallized to a two-phase mixture of W and W2N through the primary crystallization and eutectic crystallization. The resulting microstructure after annealing at 800 °C consisted of large primary crystals with a eutectic mixture of W and W2N microcrystallites in the intergranular boundary region. In case of the amorphous film with near-eutectic composition of W0.79N0.21, it transformed directly into a two-phase mixture of W and W2N through the eutectic crystallization at 600 °C without the primary crystallization. On the other hand, polycrystalline W2N films had a columnar structure and did not undergo any microstructural change during annealing up to 800 °C. 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Amorphous WNx films eventually crystallized to a two-phase mixture of W and W2N through the primary crystallization and eutectic crystallization. The resulting microstructure after annealing at 800 °C consisted of large primary crystals with a eutectic mixture of W and W2N microcrystallites in the intergranular boundary region. In case of the amorphous film with near-eutectic composition of W0.79N0.21, it transformed directly into a two-phase mixture of W and W2N through the eutectic crystallization at 600 °C without the primary crystallization. On the other hand, polycrystalline W2N films had a columnar structure and did not undergo any microstructural change during annealing up to 800 °C. Barrier properties of WNx film versus Cu diffusion are discussed in relation with the microstructural changes of the films.</abstract><doi>10.1063/1.1337079</doi><tpages>6</tpages></addata></record> |
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| ispartof | Journal of applied physics, 2001-04, Vol.89 (7), p.4128-4133 |
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| source | AIP Journals Complete; AIP Digital Archive |
| title | Crystallization of amorphous WNx films |
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