Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas

We have developed a measurement technique for absolute H-atom densities in process plasmas using vacuum ultraviolet absorption spectroscopy employing a high-pressure microdischarge hollow-cathode lamp (MHCL) as a Lyman α (Lα, 121.6 nm) emission light source. Characterization of the Lα emission-line...

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Veröffentlicht in:	Applied physics letters 1999-12, Vol.75 (25), p.3929-3931
Hauptverfasser:	Takashima, Seigou, Hori, Masaru, Goto, Toshio, Kono, Akihiro, Ito, Masafumi, Yoneda, Katsumi
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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