Vacuum-ultraviolet laser absorption spectroscopy for absolute measurement of fluorine atom density in fluorocarbon plasmas
Absolute density measurement of fluorine atoms has been performed by a vacuum-ultraviolet (VUV) laser absorption technique in fluorocarbon plasmas. A VUV laser tunable around 95 nm covering the resonance lines of F atoms has been produced in Xe gas by a two-photon resonance four-wave-mixing techniqu...
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| Veröffentlicht in: | Applied physics letters 1999-04, Vol.74 (16), p.2390-2392 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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