Thermomechanical properties and moisture uptake characteristics of hydrogen silsesquioxane submicron films

This letter describes measurement of the biaxial modulus, coefficient of thermal expansion (CTE), and moisture uptake characteristics of hydrogen silsesquioxane (HSQ) thin films. The biaxial modulus and CTE were determined using a bending beam method, and moisture uptake was studied using a quartz c...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Applied physics letters 1999-02, Vol.74 (7), p.944-946
Hauptverfasser:	Zhao, Jie-Hua, Malik, Irfan, Ryan, Todd, Ogawa, Ennis T., Ho, Paul S., Shih, Wei-Yan, McKerrow, Andrew J., Taylor, Kelly J.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

container_end_page	946
container_issue	7
container_start_page	944
container_title	Applied physics letters
container_volume	74
creator	Zhao, Jie-Hua Malik, Irfan Ryan, Todd Ogawa, Ennis T. Ho, Paul S. Shih, Wei-Yan McKerrow, Andrew J. Taylor, Kelly J.
description	This letter describes measurement of the biaxial modulus, coefficient of thermal expansion (CTE), and moisture uptake characteristics of hydrogen silsesquioxane (HSQ) thin films. The biaxial modulus and CTE were determined using a bending beam method, and moisture uptake was studied using a quartz crystal microbalance method. The biaxial modulus and CTE of a 0.5 μm HSQ film were measured on Si and Ge substrates and found to be 7.07 GPa and 20.5 ppm/°C, respectively. The value determined for the diffusion constant of water in a 0.7-μm-thick HSQ films is 3.61×10−10 cm2/s at room temperature.
doi_str_mv	10.1063/1.123417
format	Article
fullrecord	<record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1063_1_123417</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1063_1_123417</sourcerecordid><originalsourceid>FETCH-LOGICAL-c291t-bcb8028cffd909dd47111359f64446d574bfab0f1feabd5e303c8f27dbd9c65a3</originalsourceid><addsrcrecordid>eNotkE1LxDAYhIMouK6CPyFHL13zNk3THmVRV1jwsp5LPt7YrG1Tkxbcf29lPQ0zPMzAEHIPbAOs5I-wgZwXIC_ICpiUGQeoLsmKMcazshZwTW5SOi5W5JyvyPHQYuxDj6ZVgzeqo2MMI8bJY6JqsLQPPk1zRDqPk_pCunBRmQnjEnuTaHC0PdkYPnGgyXcJ0_fsw48akKZZ997EMFDnuz7dkiunFuDuX9fk4-X5sN1l-_fXt-3TPjN5DVOmja5YXhnnbM1qawsJAFzUriyKorRCFtopzRw4VNoK5IybyuXSalubUii-Jg_n3mU6pYiuGaPvVTw1wJq_jxpozh_xXyNuXQY</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Thermomechanical properties and moisture uptake characteristics of hydrogen silsesquioxane submicron films</title><source>AIP Journals Complete</source><source>AIP Digital Archive</source><creator>Zhao, Jie-Hua ; Malik, Irfan ; Ryan, Todd ; Ogawa, Ennis T. ; Ho, Paul S. ; Shih, Wei-Yan ; McKerrow, Andrew J. ; Taylor, Kelly J.</creator><creatorcontrib>Zhao, Jie-Hua ; Malik, Irfan ; Ryan, Todd ; Ogawa, Ennis T. ; Ho, Paul S. ; Shih, Wei-Yan ; McKerrow, Andrew J. ; Taylor, Kelly J.</creatorcontrib><description>This letter describes measurement of the biaxial modulus, coefficient of thermal expansion (CTE), and moisture uptake characteristics of hydrogen silsesquioxane (HSQ) thin films. The biaxial modulus and CTE were determined using a bending beam method, and moisture uptake was studied using a quartz crystal microbalance method. The biaxial modulus and CTE of a 0.5 μm HSQ film were measured on Si and Ge substrates and found to be 7.07 GPa and 20.5 ppm/°C, respectively. The value determined for the diffusion constant of water in a 0.7-μm-thick HSQ films is 3.61×10−10 cm2/s at room temperature.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.123417</identifier><language>eng</language><ispartof>Applied physics letters, 1999-02, Vol.74 (7), p.944-946</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c291t-bcb8028cffd909dd47111359f64446d574bfab0f1feabd5e303c8f27dbd9c65a3</citedby><cites>FETCH-LOGICAL-c291t-bcb8028cffd909dd47111359f64446d574bfab0f1feabd5e303c8f27dbd9c65a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Zhao, Jie-Hua</creatorcontrib><creatorcontrib>Malik, Irfan</creatorcontrib><creatorcontrib>Ryan, Todd</creatorcontrib><creatorcontrib>Ogawa, Ennis T.</creatorcontrib><creatorcontrib>Ho, Paul S.</creatorcontrib><creatorcontrib>Shih, Wei-Yan</creatorcontrib><creatorcontrib>McKerrow, Andrew J.</creatorcontrib><creatorcontrib>Taylor, Kelly J.</creatorcontrib><title>Thermomechanical properties and moisture uptake characteristics of hydrogen silsesquioxane submicron films</title><title>Applied physics letters</title><description>This letter describes measurement of the biaxial modulus, coefficient of thermal expansion (CTE), and moisture uptake characteristics of hydrogen silsesquioxane (HSQ) thin films. The biaxial modulus and CTE were determined using a bending beam method, and moisture uptake was studied using a quartz crystal microbalance method. The biaxial modulus and CTE of a 0.5 μm HSQ film were measured on Si and Ge substrates and found to be 7.07 GPa and 20.5 ppm/°C, respectively. The value determined for the diffusion constant of water in a 0.7-μm-thick HSQ films is 3.61×10−10 cm2/s at room temperature.</description><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1999</creationdate><recordtype>article</recordtype><recordid>eNotkE1LxDAYhIMouK6CPyFHL13zNk3THmVRV1jwsp5LPt7YrG1Tkxbcf29lPQ0zPMzAEHIPbAOs5I-wgZwXIC_ICpiUGQeoLsmKMcazshZwTW5SOi5W5JyvyPHQYuxDj6ZVgzeqo2MMI8bJY6JqsLQPPk1zRDqPk_pCunBRmQnjEnuTaHC0PdkYPnGgyXcJ0_fsw48akKZZ997EMFDnuz7dkiunFuDuX9fk4-X5sN1l-_fXt-3TPjN5DVOmja5YXhnnbM1qawsJAFzUriyKorRCFtopzRw4VNoK5IybyuXSalubUii-Jg_n3mU6pYiuGaPvVTw1wJq_jxpozh_xXyNuXQY</recordid><startdate>19990215</startdate><enddate>19990215</enddate><creator>Zhao, Jie-Hua</creator><creator>Malik, Irfan</creator><creator>Ryan, Todd</creator><creator>Ogawa, Ennis T.</creator><creator>Ho, Paul S.</creator><creator>Shih, Wei-Yan</creator><creator>McKerrow, Andrew J.</creator><creator>Taylor, Kelly J.</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>19990215</creationdate><title>Thermomechanical properties and moisture uptake characteristics of hydrogen silsesquioxane submicron films</title><author>Zhao, Jie-Hua ; Malik, Irfan ; Ryan, Todd ; Ogawa, Ennis T. ; Ho, Paul S. ; Shih, Wei-Yan ; McKerrow, Andrew J. ; Taylor, Kelly J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c291t-bcb8028cffd909dd47111359f64446d574bfab0f1feabd5e303c8f27dbd9c65a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1999</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zhao, Jie-Hua</creatorcontrib><creatorcontrib>Malik, Irfan</creatorcontrib><creatorcontrib>Ryan, Todd</creatorcontrib><creatorcontrib>Ogawa, Ennis T.</creatorcontrib><creatorcontrib>Ho, Paul S.</creatorcontrib><creatorcontrib>Shih, Wei-Yan</creatorcontrib><creatorcontrib>McKerrow, Andrew J.</creatorcontrib><creatorcontrib>Taylor, Kelly J.</creatorcontrib><collection>CrossRef</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Zhao, Jie-Hua</au><au>Malik, Irfan</au><au>Ryan, Todd</au><au>Ogawa, Ennis T.</au><au>Ho, Paul S.</au><au>Shih, Wei-Yan</au><au>McKerrow, Andrew J.</au><au>Taylor, Kelly J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Thermomechanical properties and moisture uptake characteristics of hydrogen silsesquioxane submicron films</atitle><jtitle>Applied physics letters</jtitle><date>1999-02-15</date><risdate>1999</risdate><volume>74</volume><issue>7</issue><spage>944</spage><epage>946</epage><pages>944-946</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>This letter describes measurement of the biaxial modulus, coefficient of thermal expansion (CTE), and moisture uptake characteristics of hydrogen silsesquioxane (HSQ) thin films. The biaxial modulus and CTE were determined using a bending beam method, and moisture uptake was studied using a quartz crystal microbalance method. The biaxial modulus and CTE of a 0.5 μm HSQ film were measured on Si and Ge substrates and found to be 7.07 GPa and 20.5 ppm/°C, respectively. The value determined for the diffusion constant of water in a 0.7-μm-thick HSQ films is 3.61×10−10 cm2/s at room temperature.</abstract><doi>10.1063/1.123417</doi><tpages>3</tpages></addata></record>
fulltext	fulltext
identifier	ISSN: 0003-6951
ispartof	Applied physics letters, 1999-02, Vol.74 (7), p.944-946
issn	0003-6951 1077-3118
language	eng
recordid	cdi_crossref_primary_10_1063_1_123417
source	AIP Journals Complete; AIP Digital Archive
title	Thermomechanical properties and moisture uptake characteristics of hydrogen silsesquioxane submicron films
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-12T11%3A40%3A18IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Thermomechanical%20properties%20and%20moisture%20uptake%20characteristics%20of%20hydrogen%20silsesquioxane%20submicron%20films&rft.jtitle=Applied%20physics%20letters&rft.au=Zhao,%20Jie-Hua&rft.date=1999-02-15&rft.volume=74&rft.issue=7&rft.spage=944&rft.epage=946&rft.pages=944-946&rft.issn=0003-6951&rft.eissn=1077-3118&rft_id=info:doi/10.1063/1.123417&rft_dat=%3Ccrossref%3E10_1063_1_123417%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true