Confirmation of proton beam bending in graded Si1−xGex/Si layers using ion channeling

A graded composition Si1−xGex/Si [001] layer, which has recently been proposed as a method for bending and extracting protons from high-energy particle accelerators, has been studied by angle-resolved ion channeling analysis using focused MeV proton and He+ beams. Backscattering spectrometry confirm...

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Veröffentlicht in:	Applied physics letters 1999-01, Vol.74 (2), p.227-229
Hauptverfasser:	de Kerckhove, D. G., Breese, M. B. H., Smulders, P. J. M., Jamieson, D. N.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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