Piezoelectric measurements with atomic force microscopy

An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d33) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode. The interaction between the tip and electric field present is a po...

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Veröffentlicht in:	Applied physics letters 1998-12, Vol.73 (26), p.3851-3853
Hauptverfasser:	Christman, J. A., Woolcott, R. R., Kingon, A. I., Nemanich, R. J.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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