Electro-optic beam deflector using epitaxial Pb(Zr,Ti)O3 waveguides on Nb-doped SrTiO3
Pb(Zr,Ti)O 3 (PZT) thin-film optical waveguides were grown on Nb-doped SrTiO3 substrates by solid-phase epitaxy to fabricate an electrode/waveguide/conductor structure. The propagation loss was relatively large for a PZT waveguide on a lightly Nb-doped SrTiO3 as compared with the propagation loss of...
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Veröffentlicht in: | Applied physics letters 1998-07, Vol.73 (3), p.303-305 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Pb(Zr,Ti)O 3 (PZT) thin-film optical waveguides were grown on Nb-doped SrTiO3 substrates by solid-phase epitaxy to fabricate an electrode/waveguide/conductor structure. The propagation loss was relatively large for a PZT waveguide on a lightly Nb-doped SrTiO3 as compared with the propagation loss of 4 dB/cm for the structure using undoped SrTiO3. An electro-optic beam deflection device was fabricated by preparing a prism electrode on the surface of the PZT waveguide on a lightly Nb-doped SrTiO3 substrate. Efficient deflection of the coupled laser beam in the PZT waveguide as large as 11 mrad was observed by applying 35 V between the prism electrode and the substrate. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.121816 |