High-frequency properties of SrTiO3 thin-film capacitors fabricated on polymer-coated alloy substrates

Low-temperature (200 °C) sputter deposition of SrTiO3 (STO) thin films by using ultrahigh-density ceramic target enabled us to fabricate capacitors on polyimide-isoindroquinazoline dione (PIQ)- or benzocyclobutene (BCB)-coated alloy substrates. Complex impedances of the capacitors were analyzed. Cap...

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Veröffentlicht in:	Applied physics letters 1998-01, Vol.72 (2), p.261-263
Hauptverfasser:	Sugii, Nobuyuki, Yamada, Hiroji, Kagaya, Osamu, Yamasaki, Matsuo, Sekine, Kenji, Yamashita, Kiichi, Watanabe, Mitsuhiro, Murakami, Shirou
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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