Langmuir probe analysis of distributed electron cyclotron resonance silicon nitride deposition plasma

Single and double Langmuir probe analyses have been realized in the wafer region of an electron cyclotron resonance reactor in its distributed configuration. Results in nitrogen gas have shown unambiguously that two electron populations exist in this region: one with low temperature (about 1–2eV) an...

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Veröffentlicht in:	Applied physics letters 1998-03, Vol.72 (12), p.1448-1450
Hauptverfasser:	Delmotte, F., Hugon, M. C., Agius, B., Pointu, A. M., Teodoru, S.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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