High frequency properties of Fe–Cr–Ta–N soft magnetic films

High frequency magnetic properties of a new, soft magnetic Fe–Cr–Ta–N alloy film have been investigated. Thin films with a composition of Fe-4.6% Cr-0.2% Ta-7.4% N (in atomic %) were prepared by reactive sputtering in a nitrogen-containing atmosphere. The films, most likely nanocrystalline, exhibit...

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Veröffentlicht in:Applied Physics Letters 1997-06, Vol.70 (23), p.3161-3163
Hauptverfasser: Jin, S., Zhu, W., van Dover, R. B., Tiefel, T. H., Korenivski, V., Chen, L. H.
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container_end_page 3163
container_issue 23
container_start_page 3161
container_title Applied Physics Letters
container_volume 70
creator Jin, S.
Zhu, W.
van Dover, R. B.
Tiefel, T. H.
Korenivski, V.
Chen, L. H.
description High frequency magnetic properties of a new, soft magnetic Fe–Cr–Ta–N alloy film have been investigated. Thin films with a composition of Fe-4.6% Cr-0.2% Ta-7.4% N (in atomic %) were prepared by reactive sputtering in a nitrogen-containing atmosphere. The films, most likely nanocrystalline, exhibit excellent soft magnetic properties in the as-deposited condition without any post heat treatment, e.g., Hc as low as 1.2 Oe (95.3 A/m) and 4πMs∼20 kG. The easy-axis M–H loop is square. The hard-axis loop is linear and closed, with the anisotropy field Ha=20–100 Oe (1.59–7.95 kA/m). By virtue of their high 4πMs and relatively high Ha, these soft magnetic films exhibit high permeability and low loss in the GHz frequency range with the undesirable ferromagnetic resonance interference suppressed to beyond 2 GHz.
doi_str_mv 10.1063/1.119120
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Thin films with a composition of Fe-4.6% Cr-0.2% Ta-7.4% N (in atomic %) were prepared by reactive sputtering in a nitrogen-containing atmosphere. The films, most likely nanocrystalline, exhibit excellent soft magnetic properties in the as-deposited condition without any post heat treatment, e.g., Hc as low as 1.2 Oe (95.3 A/m) and 4πMs∼20 kG. The easy-axis M–H loop is square. The hard-axis loop is linear and closed, with the anisotropy field Ha=20–100 Oe (1.59–7.95 kA/m). By virtue of their high 4πMs and relatively high Ha, these soft magnetic films exhibit high permeability and low loss in the GHz frequency range with the undesirable ferromagnetic resonance interference suppressed to beyond 2 GHz.</abstract><cop>United States</cop><doi>10.1063/1.119120</doi><tpages>3</tpages></addata></record>
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subjects CHROMIUM ALLOYS
FERROMAGNETIC MATERIALS
FERROMAGNETIC RESONANCE
FREQUENCY DEPENDENCE
GHZ RANGE
IRON ALLOYS
MAGNETIC PROPERTIES
MAGNETIC SUSCEPTIBILITY
MATERIALS SCIENCE
MICROSTRUCTURE
NITRIDES
PERMEABILITY
SPUTTERING
TANTALUM ALLOYS
THIN FILMS
title High frequency properties of Fe–Cr–Ta–N soft magnetic films
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