Cu enhanced oxidation of SiGe and SiGeC
A study of the effects of C and Ge additions on the Cu catalyzed oxidation of Si has been performed. It was found that the addition of Ge alone resulted in a marked slowdown in the rate of oxygen incorporation; during the first three days of the experiment the rate of oxygen incorporation was 25 tim...
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| Veröffentlicht in: | Applied physics letters 1997-02, Vol.70 (7), p.874-876 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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