AlGaN pn junctions

AlGaN pn homo- and heterojunctions were fabricated on silicon carbide substrates by metalorganic chemical vapor deposition. AlN concentration in AlGaN layers ranged from 2 to 8 mol %. Mesa structures were made by reactive ion etching. Electroluminescence (EL) from AlGaN pn junctions was studied. EL...

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Veröffentlicht in:Applied physics letters 1995-07, Vol.67 (1), p.115-117
Hauptverfasser: Dmitriev, V. A., Irvine, K., Carter, C. H., Zubrilov, A. S., Tsvetkov, D. V.
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container_title Applied physics letters
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creator Dmitriev, V. A.
Irvine, K.
Carter, C. H.
Zubrilov, A. S.
Tsvetkov, D. V.
description AlGaN pn homo- and heterojunctions were fabricated on silicon carbide substrates by metalorganic chemical vapor deposition. AlN concentration in AlGaN layers ranged from 2 to 8 mol %. Mesa structures were made by reactive ion etching. Electroluminescence (EL) from AlGaN pn junctions was studied. EL peaks associated with near band-to-band transition in AlGaN were detected. The minimum wavelength of EL peak of ∼348 nm (hν∼3.56 eV, 300 K) was measured for a p-Al0.08GaN0.92/n-Al0.06Ga0.94N heterojunction. The dependence of the photon energy of the edge EL peak on AlN concentration in AlGaN was measured.
doi_str_mv 10.1063/1.115501
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V.</creatorcontrib><title>AlGaN pn junctions</title><title>Applied physics letters</title><description>AlGaN pn homo- and heterojunctions were fabricated on silicon carbide substrates by metalorganic chemical vapor deposition. AlN concentration in AlGaN layers ranged from 2 to 8 mol %. Mesa structures were made by reactive ion etching. Electroluminescence (EL) from AlGaN pn junctions was studied. EL peaks associated with near band-to-band transition in AlGaN were detected. The minimum wavelength of EL peak of ∼348 nm (hν∼3.56 eV, 300 K) was measured for a p-Al0.08GaN0.92/n-Al0.06Ga0.94N heterojunction. 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title AlGaN pn junctions
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