A channel plate detector for electron backscatter diffraction
Electron backscatter diffraction (EBSD) using a scanning electron microscope has proven to be a valuable means for determining the crystal orientation of crystallites as small as ∼0.25 μm. However, it is still not widely used. One deterrent is the high cost of the image intensified video camera syst...
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| Veröffentlicht in: | Review of scientific instruments 1995-06, Vol.66 (6), p.3480-3482 |
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| container_title | Review of scientific instruments |
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| creator | Barr, D. L. Brown, W. L. |
| description | Electron backscatter diffraction (EBSD) using a scanning electron microscope has proven to be a valuable means for determining the crystal orientation of crystallites as small as ∼0.25 μm. However, it is still not widely used. One deterrent is the high cost of the image intensified video camera system that is commonly used to record the weak EBSD images produced on a phosphor screen. A much less expensive detector system has been devised using a microchannel plate (MCP) electron multiplier to provide the necessary gain in image intensity and a standard video camera to record the image. Excitation of the MCP by secondary electrons and low energy backscattered electron is prevented by a thin aluminum foil on the MCP front surface. The benefits and disadvantages of this approach to EBSD are presented, together with typical EBSD images obtained from it. |
| doi_str_mv | 10.1063/1.1145457 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0034-6748 |
| ispartof | Review of scientific instruments, 1995-06, Vol.66 (6), p.3480-3482 |
| issn | 0034-6748 1089-7623 |
| language | eng |
| recordid | cdi_crossref_primary_10_1063_1_1145457 |
| source | AIP Digital Archive |
| title | A channel plate detector for electron backscatter diffraction |
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