Force microscopy with a bidirectional capacitance sensor

A new method for sensing cantilever deflection in the atomic force microscope (AFM), based on capacitance measurement, is described. Parameters governing the design of such an instrument are considered in detail. Two different geometries are compared, wire on plate and an integrated flat plate senso...

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Veröffentlicht in:	Review of scientific instruments 1990-09, Vol.61 (9), p.2296-2308
Hauptverfasser:	Neubauer, Gabi, Cohen, Sidney R., McClelland, Gary M., Horne, Don, Mate, C. Mathew
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics
Online-Zugang:	Volltext
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