Characteristics of optical components for soft x‐ray microscopy and x‐ray holography using an undulator radiation optical system (abstract)

X‐ray Fresnel zone plates and transmission gratings, have been fabricated using fine‐focused electron‐beam lithography and Ta‐on‐SiN x‐ray mask fabrication technique. The optical components for x‐ray microscopy and x‐ray holography were evaluated in an undulator radiation system. Nanometer lithograp...

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Hauptverfasser:	Kakuchi, Masami, Ozawa, Akira, Ohkubo, Takashi, Maezawa, Hideki, Kagoshima, Yasushi, Ando, Masami
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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