Fluid simulations of radio frequency glow discharges : two-dimensional argon discharge including metastables

Fluid simulations of radio frequency glow discharges : two-dimensional argon discharge including metastables

Two-dimensional self-consistent fluid simulations of a 13.56 MHz argon glow discharge including metastable species were performed as examples of a coupled glow-discharge/neutral-transport-and-reaction system. The electron density was found to peak in the radial direction. The metastable density prof...

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Veröffentlicht in:Applied physics letters 1993-11, Vol.63 (18), p.2478-2480
Hauptverfasser: LYMBEROPOULOS, D. P, ECONOMOU, D. J
Format: Artikel
Sprache:eng
Schlagworte:
Electric discharges
Exact sciences and technology
High-frequency discharges
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
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Zusammenfassung:Two-dimensional self-consistent fluid simulations of a 13.56 MHz argon glow discharge including metastable species were performed as examples of a coupled glow-discharge/neutral-transport-and-reaction system. The electron density was found to peak in the radial direction. The metastable density profiles showed ‘‘hot spots’’ in both axial and radial directions.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.110454