Spontaneous bonding of hydrophobic silicon surfaces

The initial attraction of silicon surfaces etched in aqueous and buffered HF solutions have been studied, by observing the spontaneity and velocity of the contact wave. Also, the effect of a following water rinse was investigated. The bond strengths were determined by measuring the surface energy of...

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Veröffentlicht in:	Applied physics letters 1993-03, Vol.62 (12), p.1362-1364
Hauptverfasser:	LJUNGBERG, K, SÖDERBÄRG, A, BÄCKLUND, Y
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Mechanical and acoustical properties adhesion Physics Solid surfaces and solid-solid interfaces Solid-fluid interfaces Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Online-Zugang:	Volltext
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