Sputtering of YBa2Cu3O7−δ/NdAlO3/YBa2Cu3O7−δ trilayers
Epitaxial YBa2Cu3O7−δ/NdAlO3/YBa2Cu3O7−δ-trilayers were grown by sputtering from stoichiometric targets. The YBa2Cu3O7−δ (YBCO) films were deposited by dc-magnetron sputtering. For the NdAlO3 films, rf-magnetron sputtering was used. The individual YBCO films revealed critical-current densities up to...
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Veröffentlicht in: | Applied physics letters 1992-06, Vol.60 (26), p.3304-3306 |
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Hauptverfasser: | , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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