Large-area, two-sided superconducting YBa2Cu3O7-x films deposited by pulsed laser deposition

The in situ excimer-laser deposition process is demonstrated, for the first time, to be an effective technique for producing superconducting films on both sides of substrate wafers of up to 5 cm in diameter. By exploiting the directed nature of the laser produced plume and controlling its off-axis c...

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Veröffentlicht in:	Applied physics letters 1991-09, Vol.59 (11), p.1374-1376
Hauptverfasser:	FOLTYN, S. R, MUENCHAUSEN, R. E, DYE, R. C, WU, X. D, LUO, L, COOKE, D. W, TABER, R. C
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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