Dependence of the saturated light-induced defect density on macroscopic properties of hydrogenated amorphous silicon

We report a study of the saturated light-induced defect density Ns,sat in 37 hydrogenated (and in part fluorinated) amorphous silicon [a-Si:H(F)] films grown in six different reactors under widely different conditions. Ns,sat was attained by exposing the films to light from a krypton ion laser (λ=64...

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Veröffentlicht in:Applied physics letters 1990-10, Vol.57 (14), p.1440-1442
Hauptverfasser: PARK, H. R, LIU, J. Z, CABARROCAS, P. R, MARUYAMA, A, ISOMURA, M, WAGNER, S, ABELSON, J. R, FINGER, F
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container_end_page 1442
container_issue 14
container_start_page 1440
container_title Applied physics letters
container_volume 57
creator PARK, H. R
LIU, J. Z
CABARROCAS, P. R
MARUYAMA, A
ISOMURA, M
WAGNER, S
ABELSON, J. R
FINGER, F
description We report a study of the saturated light-induced defect density Ns,sat in 37 hydrogenated (and in part fluorinated) amorphous silicon [a-Si:H(F)] films grown in six different reactors under widely different conditions. Ns,sat was attained by exposing the films to light from a krypton ion laser (λ=647.1 nm). Ns,sat is determined by the constant photocurrent method and lies between 5×1016 and 2×1017 cm−3. Ns,sat drops with decreasing optical gap Eopt and hydrogen content cH, but is not correlated with the initial defect density Ns,ann or with the Urbach tail energy Eu. We discuss our results within the framework of existing models for light-induced defects.
doi_str_mv 10.1063/1.103364
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subjects Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electron density of states and band structure of crystalline solids
Electron states
Exact sciences and technology
Physics
title Dependence of the saturated light-induced defect density on macroscopic properties of hydrogenated amorphous silicon
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