Resolution Enhancement Methods in Optical Microscopy for Dimensional Optical Metrology
In this paper we discuss several enhancement approaches to increase the resolution and sensitivity of optical microscopy as a tool for dimensional nanometrology. Firstly, we discuss a newly developed through-focus microscopy technique providing additional phase information from afocal images to incr...
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| Veröffentlicht in: | Journal of the European Optical Society. Rapid publications 2025-01 |
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| container_title | Journal of the European Optical Society. Rapid publications |
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| creator | Bodermann, Bernd Nouri, Mohammad Olivero, Paolo Kroker, Stefanie Ruo-Berchera, Ivano Tyagi, Himanshu Roy, Deb Mukherjee, Deshabrato Siefke, Thomas Erik Hansen, Poul Tranum Rømer, Astrid Valtr, Miroslav Aprà, Pietro Petrik, Peter Kaeseberg, Tim |
| description | In this paper we discuss several enhancement approaches to increase the resolution and sensitivity of optical microscopy as a tool for dimensional nanometrology. Firstly, we discuss a newly developed through-focus microscopy technique providing additional phase information from afocal images to increase the nanoscale sensitivity of classical microscopy. We also explore different routes to label-free or semiconductor compatible labelling super-resolution microscopy suitable for a broad range of technical applications. We present initial results from, a new wide-field super-resolution imaging technique enabled by Raman scattering. In addition, we discuss super-resolution imaging using NV centres in nano-diamonds as labels and their application in future reference standards. |
| doi_str_mv | 10.1051/jeos/2025002 |
| format | Article |
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| language | eng |
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| source | DOAJ Directory of Open Access Journals; Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals |
| title | Resolution Enhancement Methods in Optical Microscopy for Dimensional Optical Metrology |
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