Influence of thickness and deposition angle on structural and optical properties of manganese oxide thin films
Manganese oxide thin films were produced on glass substrates by resistive evaporation at room temperature. The layers with different thickness (30 and 90 nm) at different deposition angles (0 and 40°) were prepared by electron gun evaporation method under ultra-high vacuum condition. After depositio...
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| Veröffentlicht in: | European physical journal. Applied physics 2021-07, Vol.95 (1), p.10302 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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