Epitaxial electro-optical BaTiO3 films by single-source metal-organic chemical vapour deposition

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Veröffentlicht in:	Journal of materials chemistry 1997, Vol.7 (6), p.933-936
Hauptverfasser:	ZHAO, J, FUFLYIGIN, V, WANG, F, NORRIS, P. E, BOUTHILETTE, L, WOODS, C
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
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source	Royal Society Of Chemistry Journals; Royal Society of Chemistry Journals Archive (1841-2007)
subjects	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
title	Epitaxial electro-optical BaTiO3 films by single-source metal-organic chemical vapour deposition
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