Single-step growth of MoO 3 nanorods via magnetron sputtering
Uniformly distributed crystalline α-molybdenum oxide nanorods (NRs) were grown on c -plane sapphire substrates using a single-step radio frequency sputtering technique. The shape and size of the NRs can be controlled by regulating the composition of the sputtering gas (Ar : O 2 mixture). A pin-like...
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| Veröffentlicht in: | CrystEngComm 2023-01, Vol.25 (3), p.378-384 |
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| creator | Gudena, Gutema Teshome Cho, Hyeon Ho Megersa, Daba Deme Lee, Jaeyeong Bae, Jong Seong Yu, Hak Ki |
| description | Uniformly distributed crystalline α-molybdenum oxide nanorods (NRs) were grown on
c
-plane sapphire substrates using a single-step radio frequency sputtering technique. The shape and size of the NRs can be controlled by regulating the composition of the sputtering gas (Ar : O
2
mixture). A pin-like nanowire structure was observed at an Ar : O
2
ratio of 20 : 0, which transformed to NRs at Ar : O
2
ratios of 20 : 2 and 20 : 4. Additionally, the length of the NRs increased with an increase in the deposition time. X-ray diffraction and transmission electron microscopy analyses indicated the highly crystalline nature of the NRs. X-ray photoelectron spectroscopy measurements revealed that the NRs were composed of nearly stoichiometric α-MoO
3
. Humidity sensing experiments indicated that the as-grown α-MoO
3
NRs have good sensitivity to moisture. |
| doi_str_mv | 10.1039/D2CE01450E |
| format | Article |
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c
-plane sapphire substrates using a single-step radio frequency sputtering technique. The shape and size of the NRs can be controlled by regulating the composition of the sputtering gas (Ar : O
2
mixture). A pin-like nanowire structure was observed at an Ar : O
2
ratio of 20 : 0, which transformed to NRs at Ar : O
2
ratios of 20 : 2 and 20 : 4. Additionally, the length of the NRs increased with an increase in the deposition time. X-ray diffraction and transmission electron microscopy analyses indicated the highly crystalline nature of the NRs. X-ray photoelectron spectroscopy measurements revealed that the NRs were composed of nearly stoichiometric α-MoO
3
. Humidity sensing experiments indicated that the as-grown α-MoO
3
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c
-plane sapphire substrates using a single-step radio frequency sputtering technique. The shape and size of the NRs can be controlled by regulating the composition of the sputtering gas (Ar : O
2
mixture). A pin-like nanowire structure was observed at an Ar : O
2
ratio of 20 : 0, which transformed to NRs at Ar : O
2
ratios of 20 : 2 and 20 : 4. Additionally, the length of the NRs increased with an increase in the deposition time. X-ray diffraction and transmission electron microscopy analyses indicated the highly crystalline nature of the NRs. X-ray photoelectron spectroscopy measurements revealed that the NRs were composed of nearly stoichiometric α-MoO
3
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3
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c
-plane sapphire substrates using a single-step radio frequency sputtering technique. The shape and size of the NRs can be controlled by regulating the composition of the sputtering gas (Ar : O
2
mixture). A pin-like nanowire structure was observed at an Ar : O
2
ratio of 20 : 0, which transformed to NRs at Ar : O
2
ratios of 20 : 2 and 20 : 4. Additionally, the length of the NRs increased with an increase in the deposition time. X-ray diffraction and transmission electron microscopy analyses indicated the highly crystalline nature of the NRs. X-ray photoelectron spectroscopy measurements revealed that the NRs were composed of nearly stoichiometric α-MoO
3
. Humidity sensing experiments indicated that the as-grown α-MoO
3
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| fulltext | fulltext |
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| ispartof | CrystEngComm, 2023-01, Vol.25 (3), p.378-384 |
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| language | eng |
| recordid | cdi_crossref_primary_10_1039_D2CE01450E |
| source | Royal Society Of Chemistry Journals 2008-; Alma/SFX Local Collection |
| title | Single-step growth of MoO 3 nanorods via magnetron sputtering |
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