Self-assembly nanostructured gold for high aspect ratio silicon microstructures by metal assisted chemical etching

Self-assembly gold nanostructured membranes are created to mechanically stabilize the catalyst movement during metal assisted chemical etching. This results in an improved vertical control of the etching profile for high aspect ratio silicon microstructures. The new method is a robust and cheap micr...

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Veröffentlicht in:	RSC advances 2016-01, Vol.6 (19), p.1625-1629
Hauptverfasser:	Romano, L, Kagias, M, Jefimovs, K, Stampanoni, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical etching Diffraction gratings Gold High aspect ratio Microstructure Nanostructure Self assembly Silicon
Online-Zugang:	Volltext
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